What are the steps included in the LIGA process?
Overview. The LIGA consists of three main processing steps; lithography, electroplating and molding.
What is LIGA fabrication technology discuss the major process steps in LIGA fabrication process?
LIGA is a German acronym for, Lithographie Lithography Galvanoformung Electroplating Abformung Molding Introduction The MEMS micromachining process known as LIGA utilizes the following three fabrication process steps LIGA fabrication is used to create high-aspect ratio structures through the use of x- rays produced by …
What is LIGA technique?
LIGA is a micromachining technique which utilizes X-ray lithography, electroforming and micromolding processes to produce precise and high-aspect-ratio microstructures.
What’s UV LIGA process?
The technique known as UV-LIGA, is used to manufacture micro-components and is inspired by microelectronic technologies. It combines the processes of photolithography and electroforming, is highly accessible in terms of production costs and is easily and rapidly implemented.
What are the advantages of LIGA process?
The major advantages of the LIGA process are the high aspect ratios made possible and therefore the larger heights of the pieces, very sharp vertical sidewalls as well as the possibility to produce three-dimensional structures by using a sacrificial layer as described above.
Why is electroplating is necessary in a LIGA process?
Primarily the LIGA-process provides high aspect ratio micro structures in polymers like e.g. PMMA (better known as acrylic glass). Via electroplating these structures can be replicated in metals like gold, nickel, magnetic nickel-iron alloys or copper. Even replications in ceramics are possible.
What is the significance of surface micromachining LIGA process in MEMS?
Surface micromachining is used to pattern the backside as well as to create a metal electronic sensing circuit on the frontside of the wafer. Below is the process used to fabricate this MEMS pressure sensor. • A thin film of silicon nitride is deposited onto both sides (frontside / backside) of the wafer.
Which one of the following is the most common form of radiation used in Liga?
Ultraviolet radiation is the most common form of radiation which is used in photolithography. Due to the most common use of ultraviolet radiation photolithography is also commonly called as UV lithography.
What are the advantages and disadvantages of LIGA process?
Advantages: small surface roughness, resulting nickel tool has a good surface chemistry for most polymers. Drawbacks: slow growth rate of nickel in the electroplating process (10-100µm/h), high stress levels in thick nickel layers, radial dependency of the growth rate (unwanted difference of structures height).
Which one of the following is the most common form of radiation used in LIGA?
What is photolithography in MEMS?
Introduction. Photolithography is the process that defines and transfers a pattern onto a thin film layer on the wafer. In the photolithography process a light source is typically used to transfer an image from a patterned mask to a photosensitive layer (photoresist or resist) on a substrate or another thin film.
What is lithography in MEMS?
Lithography in the MEMS context is typically the transfer of a pattern to a photosensitive material by selective exposure to a radiation source such as light. A photosensitive material is a material that experiences a change in its physical properties when exposed to a radiation source.
What are the preparation techniques of a MEMS device?
The fabrication of MEMS evolved from the process technology in semiconductor device fabrication, i.e. the basic techniques are deposition of material layers, patterning by photolithography and etching to produce the required shapes.
What are micromachining techniques?
Micromachining is a specific technique applied to micro scale parts. Micro Electro Mechanical Systems (MEMS) are microscopic devices processed, designed, and used to interact with or modify the local environment. They can be referred as microstructures, microsystems, mechatronics and microstructure technology.
What is Liga technique in MEMS fabrication?
MEMs fabrication using LIGA Technique. It is a fabrication technique that involves lithography, electroplating, and molding on a single substrate. 1st step involves the deposition of a layer of Titanium or copper or Aluminum on the substrate to form a pattern.
How to fabricate MEMS device?
Fabrication of MEMs device involves the basic IC fabrication methods along with the micromachining process involving the selective removal of silicon or the addition of other structural layers. Step1: The first step involves the circuit design and drawing of the circuit either on a paper or on using software like PSpice or Proteus.
What is the 5th step in MEMS fabrication?
The fifth step involves dry etching or removal of the structural layer to reveal the underlying layers. The 6th step involves the removal of the oxide layer and the spacer layer to form the required structure. The rest of the steps are similar to the bulk micromachining technique. MEMs fabrication using LIGA Technique.
What is the process of Liga plastic injection molding?
Plastic injection molding takes place. The LIGA-fabrication process is composed of: 1. Exposure, 2. Development 3. Electroforming 4. Stripping 5. Replication LIGA Micromaching Process